Jandel Wafer Probing System

Jandel Engineering Limited offers the RM3000 Test Unit in combination with the Multiposition Probe stand as a solution for measurements on wafers up to 200mm diameter. The probe is available in two sizes at the same cost. One size is for wafers up to 150mm diameter and the second for wafers up to 200mm diameter.

If small sized wafers are to be measured the smaller version is more suitable for placement of the wafers on the measurement table. The Θ movement clicks in four positions at 90 degrees and the linear movement in up to 10 positions giving repeat placement accuracy of +/- 1mm.

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Specifications
Max. sample size150mm wafer (200mm wafer on request at no extra cost)
Max. sample thicknessSamples up to 4mm thick can be measured
MicroswitchPrevents current flow when probe is not in contact with the sample
Manual ControlSimple lever operation for probe contact and removal
Simple set upSingle wire connects the probe stand and RM3000+
X-Θ StageRepositioning accuracy of +/-1mm

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Product FAQs

Who is Jandel Engineering Ltd?
Jandel Engineering was established in 1967. Prior to founding Jandel Engineering, Managing Director John Clark worked for A & M Fell in London. It was at this company that the first commercially available four point probe head, the 'Fell' probe head, was designed by John Clark and a colleague. Since this original design many improvements have been introduced.
Why use Jandel probes?
Jandel Probes offer the accuracy and perfection of more than 30 years experience. Tip radii and probe spacings are checked by interferometer and video inspection for certainty of accuracy. Spring loadings are checked by electronic force gauge. Unique Standard specifications include: 1) Upper and lower guides are jewelled 2) Solid tungsten carbide needles for superior durability and accuracy 3) Teflon insulation giving minimum leakage
Why are there so many different characteristics?
Different users wish to probe different items, which means it is necessary to provide a wide range of characteristics. For instance someone wishing to measure a layer beneath an oxide would need sharp probes to penetrate the oxide layer, whereas a very thin metallic layer may require a much larger radius on the needles so that they do not puncture the layer. Similarly, some spacings are designed in order to help with the maths involved in working out resistivity, someone else may just require a very close spacing probe in order to fit all the probes on the sample.
What model of probe should I use?
Jandel has many different shaped probe heads. The best one for you depends entirely on your application and what machine (if any) you are using. Contact us with details of the probe you have now and we will let you know the best probe for you. Alternatively, if you wish to make a custom set up, we can help you to identify which probe will work best.