CDE ResMap

Jandel Engineering Limited manufactures the cartridge with 6-way connector probe head to be compatible with systems manufactured by CDE, Creative Design Engineering. Such systems have names like ResMap 168, ResMap 178 etc.

The probe manufactured for KLA/Tencor/Prometrix tools is very similar, however the probes are not inter-changeable and great care should be taken, especially if both systems are in use on site. CDE compatible probe heads have a distinctive black nosepiece.

All Jandel probes are built to a high level of mechanical accuracy. Specifications for radii, spacing and planarity are verified by video inspection system and optical interferometer. Loads are verified by electronic force gauge. Each probe has upper and lower jeweled needle guides.

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Specifications
Probe spacing0.500mm, 0.635mm, 1.00mm, 1.27mm, 1.591mm (needle to needle)
Tolerance+/- 10 microns
ArrangementLinear or square array
NeedlesTungsten carbide 0.4mm diameter (0.3mm diameter for close spacing)
Needle option50% Osmium alloy tips are available
Radii12.5, 25, 40, 100, 150, 200, 300, 500 microns
Retraction to pad0.5 mm
Planarity+/- 0.025mm or better
LoadsFixed between 100g and 250g
Electrical leakage1013 ohms resistance between needles at 500 volts

Please note: CDE tools operate differently to other systems and the needles should never be retracted as far as the probe body. The optimum load is at 0.5mm retraction and the system should be carefully set up prior to the probe being used so that this is achieved. Alternatively the auto touch function can be used on some models.

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Product FAQs

Who is Jandel Engineering Ltd?
Jandel Engineering was established in 1967. Prior to founding Jandel Engineering, Managing Director John Clark worked for A & M Fell in London. It was at this company that the first commercially available four point probe head, the 'Fell' probe head, was designed by John Clark and a colleague. Since this original design many improvements have been introduced.
Who makes Jandel's probes?
Experts! All probe heads are made by experienced engineers with a minimum of five years intensive training. Some of our probe builders can boast over 20 years experience.
Why use Jandel probes?
Jandel Probes offer the accuracy and perfection of more than 30 years experience. Tip radii and probe spacings are checked by interferometer and video inspection for certainty of accuracy. Spring loadings are checked by electronic force gauge. Unique Standard specifications include: 1) Upper and lower guides are jewelled; 2) Solid tungsten carbide needles for superior durability and accuracy; and 3) Teflon insulation giving minimum leakage;
Why are there so many different characteristics?
Different users wish to probe different items, which means it is necessary to provide a wide range of characteristics. For instance, someone wishing to measure a layer beneath an oxide would need sharp probes to penetrate the oxide layer, whereas a very thin metallic layer may require a much larger radius on the needles so that they do not puncture the layer. Similarly, some spacings are designed in order to help with the maths involved in working out resistivity, someone else may just require a very close spacing probe in order to fit all the probes on the sample.
What model of probe should I use?
Jandel has many different shaped probe heads. The best one for you depends entirely on your application and what machine (if any) you are using. Contact us with details of the probe you have now and we will let you know the best probe for you. Alternatively, if you wish to make a custom set up, we can help you to identify which probe will work best.
Which characteristics should I use?
The characteristics needed vary depending on the material being probed. If you contact us we may be able to advise the best characteristics for your samples from past experience. Alternatively, once an order is placed, you have the option of sending us a typical sample of the material you wish to probe and we will test it so that you can be sure to receive the best characteristics for your application. There is no charge for this service.